- It is standardized to 120m3/hr and therefore the construction term can be shortened.
(Package type is available for 0.5, 1.0, and 2.0m3/hr.)
- Product cleanliness may be improved and chemical usage may be reduced by using the ultrapure water as functional water (ozone water and hydrogen water) with certain gas dissolved into it.
- For LCD panel cleaning
- For solar panel cleaning
- For PDP (plasma display panel) cleaning
- IC chip cleaning